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Miniature Kinematic Mirror Mount for UHV Service

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Abstract

A miniature kinematic mount allows adjustment of mirror pointing inside ultrahigh vacuum (UHV) by rotating finely threaded screws outside of vacuum. The mount assembly is less than 0.620 in. in diameter, so it fits through the stan­dard tubing used with miniature conflat flanges. The mount is a point-line-plane device with a sapphire ball at the point position, so that no lubrication is required in vacuum.

© 1995 Optical Society of America

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