Abstract

One can create conical microlens arrays on a glass plate by simply spin coating spin-on-glass film on the glass, patterning the photoresist, and then etching the glass in a HF solution. These arrays can be used to obtain more-uniform irradiance profiles from nonuniform incoherent sources.

© 1995 Optical Society of America

Production of spectrally narrow soft-x-ray radiation through the use of broadband laser-produced plasma sources and multilayer-coated reflecting optics

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