Abstract

Systematic errors in phase-measuring profilometry that are introduced by the modulation transfer function of a digital image-acquisition device are analyzed. New phase expressions and phase-deviation formulas are given. The results for simulations and experiments demonstrate that the algorithm of phase-measuring profilometry cannot be regarded as a point-to-point operation. To obtain precise results, an optimum scheme for setting the measurement system is also proposed.

© 1994 Optical Society of America

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