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Polarized light reflectometer

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Abstract

The modulated reflected and nonreflected light fluxes, measured as the azimuth of incident linearly polarized light is varied, yield the absolute reflectances Rp and Rs of a dielectric or semiconductor surface. Application to a reflective Si detector determines the refractive index and thickness of a SiO2 film on the detector surface.

© 1994 Optical Society of America

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