Abstract
We propose a new method for calibrating the three-dimensional (3-D) behavior of a scanning stage. Four laser interferometers are used to determine the position of the corner point of a corner mirror attached to the stage. We calculated the 3-D coordinate of the corner point by using only the length information given by the four laser interferometers; thus a method is realized that is traceable from the practical definition of length and that facilitates the optical alignment that is necessary for the interferometers. We calibrated a commercial 3-D stage by the proposed method with a coordinate accuracy of 20–30 nm.
© 1994 Optical Society of America
Full Article | PDF ArticleMore Like This
Hyug-Gyo Rhee, Jiyoung Chu, and Yun-Woo Lee
Opt. Express 15(8) 4435-4444 (2007)
Wansong Li, Xianyu Su, and Zhongbao Liu
Appl. Opt. 40(20) 3326-3333 (2001)
Jie Zhang, Tetsuya Yamaguchi, Koichi Iwata, Hisao Kikuta, and Choong Sik Park
Appl. Opt. 42(28) 5661-5669 (2003)