Abstract

A prototype multimode fiber-based Fabry–Perot interferometric pressure probe utilizing a corrugated diaphragm with built-in temperature compensation, with signal recovery by coherence reading, has been constructed and demonstrated. A separate fiber-optic-based temperature sensor was incorporated into the pressure sensor to permit the pressure measurement to be corrected for the temperature dependence of the pressure probe. A measurement range to resolution of 3.6 × 10⁴ − 1 and an overall measurement accuracy of ±0.15% have been achieved. This system represents a practical approach for industrial use.

© 1993 Optical Society of America

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