Abstract

We discuss the fracture of dielectric coatings during the irradiation of a high-power (10^8–9 W/cm²) KrF laser by analyzing the thermal stress distribution within the coatings. It is shown that it is the compressive stresses perpendicular to the coating surface that make the optical coatings crack.

© 1993 Optical Society of America

Thermodynamic damage mechanism of transparent films caused by a low-power laser

ZhiLin Xia, JianDa Shao, ZhengXiu Fan, and ShiGang Wu
Appl. Opt. 45(32) 8253-8261 (2006)

Numerical and experimental study of the thermal stress of silicon induced by a millisecond laser

Xi Wang, Yuan Qin, Bin Wang, Liang Zhang, Zhonghua Shen, Jian Lu, and Xiaowu Ni
Appl. Opt. 50(21) 3725-3732 (2011)

Testing of the durability of single-crystal calcium fluoride with and without antireflection coatings for use with high-power KrF excimer lasers

Doug J. Krajnovich, M. Kulkarni, W. Leung, A. C. Tam, A. Spool, and B. York
Appl. Opt. 31(28) 6062-6075 (1992)

Model for laser damage dependence on thin-film morphology

L. J. Shaw-Klein, S. J. Burns, and S. D. Jacobs
Appl. Opt. 32(21) 3925-3929 (1993)

Mechanisms for the millisecond laser-induced functional damage to silicon charge-coupled imaging sensors

Zewen Li, Xi Wang, Zhonghua Shen, Jian Lu, and Xiaowu Ni
Appl. Opt. 54(3) 378-388 (2015)