Abstract
Studies are performed to determine an upper limit on the optical damage threshold of a soft-x-ray molybdenum–silicon multilayer reflective coating by the use of a 308-nm, 15-ns pulse from a Xe–Cl excimer laser in order to simulate the potential damage induced by the x-ray flux from a pulsed laser-produced plasma. Experimental results yield a value of 0.26 J/cm2 to produce visible signs of damage as determined by optical microscopy. Experiments are conducted first on silicon, as a reference point of a bulk material, and then applied to molybdenum–silicon in an effort to facilitate a theoretical comparison between a simple and a more complicated material. Theoretical predictions are in reasonable agreement with experimental results, but suggest that a lower value of 0.085 J/cm2 might cause significant thermal-induced damage.
© 1993 Optical Society of America
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