Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Investigation of distortion and damage of molybdenum–silicon multilayer reflective coatings with high-intensity ultraviolet radiation

Not Accessible

Your library or personal account may give you access

Abstract

Studies are performed to determine an upper limit on the optical damage threshold of a soft-x-ray molybdenum–silicon multilayer reflective coating by the use of a 308-nm, 15-ns pulse from a Xe–Cl excimer laser in order to simulate the potential damage induced by the x-ray flux from a pulsed laser-produced plasma. Experimental results yield a value of 0.26 J/cm2 to produce visible signs of damage as determined by optical microscopy. Experiments are conducted first on silicon, as a reference point of a bulk material, and then applied to molybdenum–silicon in an effort to facilitate a theoretical comparison between a simple and a more complicated material. Theoretical predictions are in reasonable agreement with experimental results, but suggest that a lower value of 0.085 J/cm2 might cause significant thermal-induced damage.

© 1993 Optical Society of America

Full Article  |  PDF Article
More Like This
Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

David P. Gaines, Ronnie C. Spitzer, Natale M. Ceglio, Michael Krumrey, and Gerhard Ulm
Appl. Opt. 32(34) 6991-6998 (1993)

Silicide layer growth rates in Mo/Si multilayers

Robert S. Rosen, Daniel G. Stearns, Michael A. Viliardos, Michael E. Kassner, Stephen P. Vernon, and Yuanda Cheng
Appl. Opt. 32(34) 6975-6980 (1993)

Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure

A.R. Khorsand, R. Sobierajski, E. Louis, S. Bruijn, E.D. van Hattum, R.W.E. van de Kruijs, M. Jurek, D. Klinger, J.B. Pelka, L. Juha, T. Burian, J. Chalupsky, J. Cihelka, V. Hajkova, L. Vysin, U. Jastrow, N. Stojanovic, S. Toleikis, H. Wabnitz, K. Tiedtke, K. Sokolowski-Tinten, U. Shymanovich, J. Krzywinski, S. Hau-Riege, R. London, A. Gleeson, E.M. Gullikson, and F. Bijkerk
Opt. Express 18(2) 700-712 (2010)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved