Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Fabrication of buried channel waveguides on silicon substrates using spin-on glass

Not Accessible

Your library or personal account may give you access

Abstract

A new process for the deposition of thick (≈10-μm) films of silica and titania-doped silica on silicon substrates is described. Films are built up by repetitive operation of a simple process cycle in which a layer of sol-gel material is deposited by spin coating, then densified by rapid thermal annealing. Stress-free layers are obtained through careful choice of the anneal temperature. Bilayer structures suitable for waveguide fabrication may also be constructed by performing two successive deposition runs using sol-gel precursors with different titania concentrations. These bilayers may be patterned topographically into ridges by using reactive ion etching, and the ridges may be planarized by applying additional layers of sol-gel material to form buried channel waveguides.

© 1993 Optical Society of America

Full Article  |  PDF Article
More Like This
Double layer SiO2–TiO2 sol–gel thin films on glass for antireflection, antifogging, and UV recoverable self-cleaning

F. M. Fardo, R. S. Ribeiro, J. A. Strauss, J. Nardi, L. C. Ferreira, G. Schmökel, T. M. H. Costa, M. B. Pereira, and F. Horowitz
Appl. Opt. 59(25) 7720-7725 (2020)

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

M. A. Butt, Ł. Kozłowski, and R. Piramidowicz
Appl. Opt. 62(5) 1296-1302 (2023)

Characterisation and functionalisation of cold-processed titania sol-gel layers on silica and silicate surfaces

George Huyang, Ingemar Petermann, John Canning, Masood Naqshbandi, and Maxwell J. Crossley
Opt. Mater. Express 2(2) 222-227 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved