Abstract

The spatial distribution of amplitude and phase in the diffraction near field behind phase-shifting structures of infinite length and small rectangular cross section (≤ λ², λ is the wavelength) is investigated for incident, linearly polarized plane waves. The near fields are computed by an inverse Fourier transformation of the calculated angular spectra; 3-cm microwave measurements yield good agreement. The computed near fields are compared to the structure images in the range of geometrical optics. Quantitative relations are derived for the deviations between the corresponding angular spectra, depending on polarization of the incident wave and structure thickness.

© 1993 Optical Society of America

Structure determination of weak phase objects from interferometric near-field measurements

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