Abstract

A scanning optical microscope system is proposed that uses a slightly laterally offset optical fiber. The fiber is capable of supporting two modes, and it is shown that by detecting the interference between these modes the response to surface height is linear in the focal region. This linearity permits noncontacting surface profilometry to be readily obtained for specimens of uniform reflectivity. For other specimens, a simple feedback system is introduced to obtain surface profiles as well as intensity-coded height images.

© 1992 Optical Society of America

Differential confocal scanning microscope with a two-mode optical fiber

R. Juškaitis and T. Wilson
Appl. Opt. 31(7) 898-902 (1992)

Confocal scanning optical microscope using single-mode fiber for signal detection

Shigeharu Kimura and Tony Wilson
Appl. Opt. 30(16) 2143-2150 (1991)

Interferometric scanning optical microscope for surface characterization

M. Jeff Offside and Michael G. Somekh
Appl. Opt. 31(31) 6772-6782 (1992)

Image formation in two-mode fiber-based confocal microscopes

T. Wilson
J. Opt. Soc. Am. A 10(7) 1535-1543 (1993)

Fiber-optic confocal microscope: FOCON

Tim Dabbs and Monty Glass
Appl. Opt. 31(16) 3030-3035 (1992)