Abstract

Infrared, ultraviolet, and mass spectrometers are used to study the evolution of gaseous impurities as a function of time in a discharge-excited KrF laser. The major contaminants detected, listed in order of prominence, are HF, CF4, COF2, SiF4, and CO2. The effect of each of these individual impurities on the laser performance is measured, and the results are used in a simple model that accurately predicts the decrease in laser output power with time. Techniques for improving the gas lifetime in KrF lasers are also discussed.

© 1992 Optical Society of America

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