Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Planarizing technique for ion-beam polishing of diamond films

Not Accessible

Your library or personal account may give you access

Abstract

Diamond films, deposited on silicon substrates through microwave-assisted chemical vapor deposition, have been polished with a 500-eV beam of oxygen ions through the use of a planarizing layer. The films’ surface roughness, in excess of 1 μm (rms) and 6 μm (peak to valley), was reduced to 35 nm (rms) and 217 nm (peak to valley). The polished films retained their diamond character and surface contamination was negligible. With this polishing process, optical applications of diamond films in the near infrared region are realizable.

© 1992 Optical Society of America

Full Article  |  PDF Article
More Like This
Oxygen–ion beam polishing of a 5-cm-diameter diamond film

Bertrand G. Bovard, Tianji Zhao, and H. Angus Macleod
Appl. Opt. 31(13) 2366-2369 (1992)

Potential material for fabricating optical mirrors: polished diamond coated silicon carbide

Xinchang Wang, Chengchuan Wang, Xiaotian Shen, and Fanghong Sun
Appl. Opt. 56(14) 4113-4122 (2017)

Ion beam planarization of diamond turned surfaces with various roughness profiles

Yaguo Li, Hideo Takino, and Frank Frost
Opt. Express 25(7) 7828-7838 (2017)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved