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Influence of aberrations of Fizeau interferometer elements on measurement errors

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Abstract

The propagation of interfering waves through the whole optical system of the Fizeau interferometer is analyzed. A general formula is found that describes the measurement errors introduced by optical elements of the system. In particular, we studied the influence of the position of the beam splitter and the objective of the imaging system of the interferometer.

© 1991 Optical Society of America

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