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Microscopic Observation of Film Cross Sections Having Steep Contours

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Abstract

A new method is proposed for microscopic observation of the thickness distribution across the thick (greater than about 12 μ) transparent film. The quality of an observation is analyzed by expressing the resolution error, image intensity, and depth of focus in terms of the refractive index and geometrical constants of the thickness distribution. Constraints are derived governing design of the viewing system by algebraically demanding that the resolution error be sufficiently small, and the image intensity and focal depth be sufficiently large. The constraints upon system parameters seem to be physically realizable.

© 1964 Optical Society of America

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Equations (11)

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