Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Transparent conducting SnOx films high rate reactively sputtered onto polyester foil

Not Accessible

Your library or personal account may give you access

Abstract

Thin SnOx films were applied to polyester foil by reactive rf magnetron sputtering. Typical data for 0.3-μm thick films were ~150-Ω resistance/square and ~76% luminous transmittance. Deposition rates exceeding 1 nm/s were obtained.

© 1990 Optical Society of America

Full Article  |  PDF Article
More Like This
Transparent and infrared-reflecting ZnO:Al films reactively sputtered onto polyester foil

Zechen Jin and Claes G. Granqvist
Appl. Opt. 26(16) 3191-3192 (1987)

Transparent conducting indium doped ZnO films by dc reactive S-gun magnetron sputtering

Zhi-Zheng Ye and Jin-Fa Tang
Appl. Opt. 28(14) 2817-2819 (1989)

Low-refractive-index indium–tin–oxyfluoride thin films made by high-rate reactive dc magnetron sputtering

S.-J. Jiang, Z.-C. Jin, and Claes G. Granqvist
Appl. Opt. 27(14) 2847-2850 (1988)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved