Thickness and refractive index dispersion measurement in a thin film using the Haidinger interferometer

Elisabeth A. de Oliveira; Jaime Frejlich

doi:10.1364/AO.28.001382

Applied Optics
Vol. 28,
Issue 7,
pp. 1382-1386
(1989)
•https://doi.org/10.1364/AO.28.001382

Thickness and refractive index dispersion measurement in a thin film using the Haidinger interferometer

Elisabeth A. de Oliveira and Jaime Frejlich

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Elisabeth A. de Oliveira and Jaime Frejlich, "Thickness and refractive index dispersion measurement in a thin film using the Haidinger interferometer," Appl. Opt. 28, 1382-1386 (1989)

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Abstract

A Haidinger interferometer setup was adapted for accurate measurement of thickness and refractive index dispersion in transparent films using some spectral lines of a commercial argon-ion laser. Experimental results are reported and compared with those from other available methods.

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Δλ_i (μm)	0.005	0.01	0.02	0.03	0.05
5 × 10^−5a	268	245	198	151	58
2 × 10^−8b	0.67 × 10⁶	0.61 × 10⁶	0.5 × 10⁶	0.38 × 10⁶	0.15 × 10⁶
5 × 10^−9c	2.7 × 10⁶	2.5 × 10⁶	2 × 10⁶	1.5 × 10⁶	0.6 × 10⁶

Sample	Description	L (μm)	B (μm²)	W (× 10⁻³)	A	l_f (μm)
1	KMR-747	6.06 ± 0.01	0.020	4.4	1.476	2.05 ± 0.004
2	KMR-747	3.07 ± 0.01	0.0195	7.0	1.478	1.04 ± 0.005
3	KMR-747	3.73 ± 0.01	0.020	3.7	1.476	1.26 ± 0.004
4	AZ-1350J	4.22 ± 0.02	0.0119	8.8	1.575	1.34 ± 0.0005
5	AZ-1350J	5.78 ± 0.01	0.011	3.8	1.582	1.83 ± 0.004
6	Glass	9.08 ± 0.01	0.009	—	1.473	3.08 ± 0.006

Sample	Description	1_F(μm)				Haidinger interferometer		Other^a
		Haidinger Interferometer	Interference2 Microscopy	Transmission9 Spectrophotometry	Talystep10	Haidinger interferometer		Other^a
		Haidinger Interferometer	Interference2 Microscopy	Transmission9 Spectrophotometry	Talystep10	B	A	B	A
1	KMR-747	2.05 ± 0.004	2.17 ± 0.01	—	2.40 ± 0.05	0.020	1.476	0.020	1.478
2	KMR-747	1.04 ± 0.005	1.24 ± 0.03	1.14 ± 0.02	1.15 ± 0.05	0.0195	1.478	0.020	1.478
3	KMR-747	1.26 ± 0.004	1.05 ± 0.05	—	__	0.020	1.476	0.020	1.478
4	AZ-1350J	1.34 ± 0.0005	1.41 ± 0.02	1.4 ± 0.1	1.40 ± 0.05	0.0119	1.575	0.02	1.582
5	AZ-1350J	1.83 ± 0.004	1.87 ± 0.03	1.8 ±0.1	1.80 ± 0.05	0.011	1.582	0.02	1.582
6	Glass	3.08 ± 0.006	—	3.04 ± 0.05^b	—	0.009	1.473	0.008	1.473

Δλ_i (μm)	0.005	0.01	0.02	0.03	0.05
5 × 10^−5a	268	245	198	151	58
2 × 10^−8b	0.67 × 10⁶	0.61 × 10⁶	0.5 × 10⁶	0.38 × 10⁶	0.15 × 10⁶
5 × 10^−9c	2.7 × 10⁶	2.5 × 10⁶	2 × 10⁶	1.5 × 10⁶	0.6 × 10⁶

Sample	Description	L (μm)	B (μm²)	W (× 10⁻³)	A	l_f (μm)
1	KMR-747	6.06 ± 0.01	0.020	4.4	1.476	2.05 ± 0.004
2	KMR-747	3.07 ± 0.01	0.0195	7.0	1.478	1.04 ± 0.005
3	KMR-747	3.73 ± 0.01	0.020	3.7	1.476	1.26 ± 0.004
4	AZ-1350J	4.22 ± 0.02	0.0119	8.8	1.575	1.34 ± 0.0005
5	AZ-1350J	5.78 ± 0.01	0.011	3.8	1.582	1.83 ± 0.004
6	Glass	9.08 ± 0.01	0.009	—	1.473	3.08 ± 0.006

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Applied Optics