Abstract

A new signal processing system for real time displacement measurement in sinusoidal phase modulating interferometry is described. Although sinusoidal phase modulating interferometry is effective in measuring with high accuracy the displacement of an object, conventional signal processing takes a long time. In this method, detection of the object's displacement is easily achieved by sampling the interference signal at those times that satisfy certain conditions and by processing the sampled signals with electric circuits in real time. The delay time of this signal processing system is <45 μs.

© 1989 Optical Society of America

Real-time phase delay compensation of PGC demodulation in sinusoidal phase-modulation interferometer for nanometer displacement measurement

Shihua Zhang, Liping Yan, Benyong Chen, Zheyi Xu, and Jiandong Xie
Opt. Express 25(1) 472-485 (2017)

Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer

Takamasa Suzuki, Katsuyuki Kobayashi, and Osami Sasaki
Appl. Opt. 39(16) 2646-2652 (2000)

Sinusoidal phase modulating interferometer using optical fibers for displacement measurement

Osami Sasaki and Kazuhide Takahashi
Appl. Opt. 27(19) 4139-4142 (1988)

Double sinusoidal phase-modulating laser diode interferometer for distance measurement

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Analysis of measurement accuracy in sinusoidal phase modulating interferometry

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