Abstract

An imaging folded cavity is used to make an instrument for measuring absolute reflectivity in the UV and VUV spectral range (110–300 nm) with an accuracy of <5 × 10⁻³ and a precision of <5 × 10⁻⁴. This method operates over an incident angle between 5 and 70° and can be used to measure transmissivity as well.

© 1989 Optical Society of America

Versatile high-precision multiple-pass reflectometer

O. Arnon and P. Baumeister
Appl. Opt. 17(18) 2913-2916 (1978)

Multiple-integrating sphere spectrophotometer for measuring absolute spectral reflectance and transmittance

G. A. Zerlaut and T. E. Anderson
Appl. Opt. 20(21) 3797-3804 (1981)

Spectral radiant power measurements of VUV and soft x-ray sources using the electron storage ring BESSY as a radiometric standard source

J. Fischer, M. Kühne, and B. Wende
Appl. Opt. 23(23) 4252-4260 (1984)

Precision measurements of photoabsorption cross sections of Ar, Kr, Xe, and selected molecules at 58.4, 73.6, and 74.4 nm

James A. R. Samson and Lifeng Yin
J. Opt. Soc. Am. B 6(12) 2326-2333 (1989)

A Precision Reflectometer

W. Swindell
Appl. Opt. 7(8) 1455-1459 (1968)