Abstract

An integrated optical interferometer consisting of Al₂O₃ waveguides placed upon an oxidized Si substrate is presented. The two waveguides forming the branches of the interferometer are stacked on top of each other with a SiO₂ buffer layer in between. The interferometer further contains two directional couplers which are realized by bending the upper waveguide toward the lower one. A masked evaporation technique is introduced to fabricate the directional couplers. The operation of the interferometer is confirmed in temperature-sensing experiments while the application of the interferometer to humidity measurement is discussed.

© 1989 Optical Society of America

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