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Improvement of abrasion resistance of SiO2/TiO2 multilayer interference filters

Yasunori Taga and Tadayoshi Itoh

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Abstract

Attempts have been made to improve the abrasion resistance of multilayer IR reflection filters of SiO2/TiO2 stacks by forming Al2O3 layers at the interfaces.

© 1989 Optical Society of America

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