Abstract

The refractive indices of gold films deposited on (111) silicon wafers are measured by a polychromatic ellipsometer at various annealing temperatures below 300°C. The reflectivity increases slightly during the initial 260°C annealing stage and then decreases drastically by 40% near 2.06 eV as the annealing temperature rises to 293.5°C. Etch pits are found on the surface as the temperature rises further.

© 1988 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Effect of thermal annealing on the optical properties and residual stress of TiO2 films produced by ion-assisted deposition

Cheng-Chung Lee, Hsi-Chao Chen, and Cheng-Chung Jaing
Appl. Opt. 44(15) 2996-3000 (2005)

Annealing dependence of residual stress and optical properties of TiO2 thin film deposited by different deposition methods

Hsi-Chao Chen, Kuan-Shiang Lee, and Cheng-Chung Lee
Appl. Opt. 47(13) C284-C287 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription