Abstract

A new basis is presented for the calculation of reflection coefficients of x rays by multilayer artifacts. Thin film interference is treated at an atomic plane level using an iterative 2 × 2 matrix method. Analytic and computational comparisons are made with the conventional dielectric approach for TM and TE polarizations at non-normal incidence. Good agreement is obtained with recent accurate measurements by Evans.

© 1987 Optical Society of America

Soft x-ray platinum-carbon multilayer mirrors

Brian L. Evans and Barry J. Kent
Appl. Opt. 26(20) 4491-4497 (1987)

Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings

R. van der Meer, I.V. Kozhevnikov, H.M.J. Bastiaens, K.-J. Boller, and F. Bijkerk
Opt. Express 21(11) 13105-13117 (2013)

Diffraction efficiencies for the higher orders of a reflection grating in the soft x-ray region: comparison between theory and experiment

Werner Jark and Michel Neviere
Appl. Opt. 26(5) 943-948 (1987)

Metallic multilayers for x rays using classical thin-film theory

B. Vidal and P. Vincent
Appl. Opt. 23(11) 1794-1801 (1984)

Analytic theory of soft x-ray diffraction by lamellar multilayer gratings

I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk
Opt. Express 19(10) 9172-9184 (2011)