Abstract

The design and characteristics of an optical filter using a holographic grating in combination with a multiple entrance and exit slit arrangement are described. The instrument transmits VUV radiation at Ar(i) 106.6 nm and Kr(i) 123.6 nm while excluding the hydrogen Lyman-α at 121.6 nm. The transmission at 123.6 nm is ∼10%, if averaged over the circular entrance aperture of 28-mm diameter without correcting for the blocking by the masks. The corresponding transmission at 121.6 nm is 0.0001 or less. The concept with selective blocking of one wavelength and transmission at another using a multiple slit arrangement is transferable to any line pair. The 123.6-nm grating efficiency has been assessed as 37%.

© 1987 Optical Society of America

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