Abstract

The design and performance of several dispersive spectrometers for reflection absorption infrared spectroscopy are presented. Sources of noise and their control are discussed in detail. Individual component selection for the spectrometers is discussed with particular attention paid to optimizing sensitivity for surface measurements. These efforts culminated in an ellipsometric spectrometer with a sensitivity of <0.01% absorption and capable of following transients with a temporal resolution of 10 ms.

© 1987 Optical Society of America

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