Abstract
A method is described to obtain the permittivity tensor of a magnetooptic layer
in a multilayer film by phase modulated ellipsometry. It is shown that the phase
difference caused by oblique incidence reflection can be separated from the
phase difference caused by the magnetooptic effect by selecting the angle of the
analyzer, i.e., a Wollaston prism and a dual detector. A numeric method is
described to extract the optical constants from the measured quantities.
© 1986 Optical Society of America
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