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Hard carbon layers for wear protection and antireflection purposes of infrared devices

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Abstract

The process of depositing hard-wear-reducing IR transparent carbon layers is described. The self-bias cathode potential and the hydrocarbon gas pressure influence the optical and mechanical properties of the layers. Two-dimensional maps show the dependence of deposition rate, optical absorption in the visible and IR, microhardness, and intrinsic stress on the two deposition parameters.

© 1985 Optical Society of America

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