Abstract

The optical surface profile is derived from the intensity distribution of the light diffracted by the surface roughness using phase retrieval techniques. This method is applied to a surface of periodic roughness such as a diamond-turned metal surface. Computer simulations and experimental results make it clear that the method is useful for a surface whose root-mean-square roughness is more than ~30 Å.

© 1985 Optical Society of America

Lensless imaging from diffraction intensity measurements by use of a noniterative phase-retrieval method

Nobuharu Nakajima
Appl. Opt. 43(8) 1710-1718 (2004)

Reconstruction of Surface Profiles from Their Diffraction Spectra

J. A. Aas
Appl. Opt. 11(7) 1579-1584 (1972)

Measurement of roughness properties of diamond-turned metal surfaces using light-scattering method

Junji Ohtsubo
J. Opt. Soc. Am. A 3(7) 982-987 (1986)

Tomographic visualization of acoustic field from intensity of diffracted light

Osami Sasaki, Yoshiaki Anbe, and Shinnosuke Takagi
Appl. Opt. 24(14) 2097-2102 (1985)

Phase retrieval from diffraction intensities by use of a scanning slit aperture

Nobuharu Nakajima
Appl. Opt. 44(29) 6228-6234 (2005)