Abstract

A magnification-type x-ray imaging system, that is, an x-ray microscope, is evaluated by taking into account the partial coherency of the illumination of the objects. The transfer characteristic proposed in an earlier paper [ J. Opt. Soc. Am. A 1, 11 ( 1984)] is used for the evaluation, and based on the results, an optimum design for a high-resolution x-ray imaging system is discussed. The image restoration method for this system is also shown.

© 1984 Optical Society of America

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