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X-ray tomography for microstructural objects

Takuso Sato, Osamu Ikeda, Yoshiki Yamakoshi, and Mototaka Tsubouchi

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Abstract

A high-resolution high-contrast x-ray tomography system for imaging the structure of submillimeter-sized objects is constructed. A precise data acquisition mechanism to realize a sharp pencil beam, use of an optimum x-ray band to achieve high contrast, deconvolution processing to restore blurred projections, and the iterative revision method to compensate for physically unavailable data are incorporated into the system. Basic experimental results obtained for an optical fiber used as a test object show that the system has ~20- μm spatial resolution and good adsorption coefficient discrimination.

© 1981 Optical Society of America

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