Abstract

The phase structure of the optical field diffracted from a straightedge has been measured using an ac interferometer. The measured phase distribution is in good agreement with the predictions of scalar diffraction theory.

© 1979 Optical Society of America

Optical phase measurement in real time

Lee M. Frantz, Alexander A. Sawchuk, and Werner von der Ohe
Appl. Opt. 18(19) 3301-3306 (1979)

Optical measurement of the IC photomask pattern area

Osamu Karatsu
Appl. Opt. 18(13) 2159-2165 (1979)

Validity of the scalar Kirchhoff and Rayleigh–Sommerfeld diffraction theories in the near field of small phase objects

M. Totzeck
J. Opt. Soc. Am. A 8(1) 27-32 (1991)

Relation between the angular dependence of scattering and the statistical properties of optical surfaces

J. M. Elson and J. M. Bennett
J. Opt. Soc. Am. 69(1) 31-47 (1979)

Particle velocity distribution measurement by holography

B. C. R. Ewan
Appl. Opt. 18(18) 3156-3160 (1979)