Abstract

Three autocollimation-type ellipsometers (ACE) are proposed for in situ study or monitoring of film growth through a single window of a vacuum chamber. An example of the monitoring is given; the growth of a Corning 7059 glass film is monitored during rf sputtering using one of the ACE that is able to process monitor directly the thickness of a transparent film.

© 1976 Optical Society of America

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