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Focus path of a laser beam deflected by a prismatic polygon mirror: its calculation and optimization

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Abstract

The focus path of a laser beam deflected by a prismatic polygon mirror was calculated. It is shown that the larger the focal distance of the objective or the polygon radius, the closer the focus path approaches a straight scanning line. Especially in the case of small pattern scanning, a remarkably small deviation between actual focus path and straight scanning line can be achieved by suitable sizing and arrangement of the optical elements.

© 1976 Optical Society of America

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