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One-dimensional photon-counting detector array for use at EUV and soft x-ray wavelengths

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Abstract

The performance of a one-dimensional photon-counting detector array based on microchannel array plates has been evaluated in the laboratory over the wavelength range from 461 Å to 1216 Å. The output charge pulses from a set of cascaded microchannel array plates were collected on a proximity-focused anode array consisting of sixty-four linear electrodes 1.3 mm in length and 25 μm in width, set on 50-μm centers. Although the dynamic range of the detector array was severely limited by ion-feedback effects in currently available microchannel array plates, the theoretical spatial resolution of 50 μm was achieved with a detection efficiency at wavelengths below 800 Å equal to that of a conventional channel electron multiplier.

© 1975 Optical Society of America

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