Abstract

The optical profilometer is a measuring instrument that utilizes a laser beam reflected from a surface to generate a profile of the reflecting surface. The device has been configured in such a manner as to allow stabilization of the measured profile with respect to laser intensity fluctuations and the reflectivity of the tested object. Measurements can be made quickly and without damaging the surface.

© 1975 Optical Society of America

Common-path optical heterodyne profilometer: a configuration

Chien Chou, Jenn-chyang Shyu, Yeu-chuen Huang, and Chen-kee Yuan
Appl. Opt. 37(19) 4137-4142 (1998)

Optical profilometer: a new method for high sensitivity and wide dynamic range

Yeshaiahu Fainman, Ehud Lenz, and Joseph Shamir
Appl. Opt. 21(17) 3200-3208 (1982)

Optical profilometer: a practical approximate method of analysis

Marek Dobosz
Appl. Opt. 22(24) 3983-3987 (1983)

Optical polar profilometer: an analyzer of circularly symmetric surfaces

Gabriel Laufer, Yeshaiahu Fainman, and Ehud Lenz
Appl. Opt. 25(1) 151-155 (1986)

Surface imaging using a noncontact divergence-ratio axi-vision camera profilometer for laparoscopic and endoscopic applications

Keigo Iizuka
Appl. Opt. 52(19) 4663-4671 (2013)