Abstract

A possible method for reconstruction of two-dimensional, periodic surface profiles from their diffraction spectra is outlined. Formulas for the distribution of diffracted power, based on physical optics, are summarized and computed by approximating real profiles by piecewise linear functions. The profiles are reconstructed from measured spectra by a steepest descent method. A computer program searches for profiles whose spectra fit as close as possible to the measured spectra. For experimental demonstration a low-power CO₂ laser is used as radiation source, and the roughness profiles of a turned metal cylinder are reconstructed and compared with traced profile curves.

© 1972 Optical Society of America

Light Scattering from Fused Polycrystalline Aluminum Oxide Surfaces

D. H. Hensler
Appl. Opt. 11(11) 2522-2528 (1972)

Surface profile measurement from intensity of diffracted light using the phase retrieval method

Osami Sasaki and Yutaka Fukuhara
Appl. Opt. 24(16) 2696-2700 (1985)

Surface Roughness Measurement by Holographic Interferometry

W. B. Ribbens
Appl. Opt. 11(4) 807-810 (1972)

Surface Roughness Measurement Using White Light Speckle

Robert A. Sprague
Appl. Opt. 11(12) 2811-2816 (1972)

Absorption Profile of a Planetary Atmosphere: A Proposal for a Scattering Independent Determination

A. L. Fymat and J. Lenoble
Appl. Opt. 11(10) 2249-2254 (1972)