Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Small-Angle Diffusing Screens for Photolithographic Camera Illumination Systems

Not Accessible

Your library or personal account may give you access

Abstract

A method is described for producing transmitting screens that diffuse light into small angles. With these screens, the amount of small-angle diffusion can be controlled while light loss from large-angle scattering is kept to a minimum. The diffusers are fabricated from two glass substrates that are ground, etched, and cemented together. There is a controlled mismatch between the optical index of the cement and that of the substrates. The screens were primarily designed for photolithographic camera illumination systems that involve a tradeoff between luminance and uniformity.

© 1972 Optical Society of America

Full Article  |  PDF Article
More Like This
Modulation Transfer Functions of Ground-Glass Screens

Paul Kuttner
Appl. Opt. 11(9) 2024-2027 (1972)

Photolithographic Mask Alignment Using Moiré Techniques

M. C. King and D. H. Berry
Appl. Opt. 11(11) 2455-2459 (1972)

Surface Flaw Detection Using Oblique Angle Illumination

T. Sawatari
Appl. Opt. 11(6) 1337-1344 (1972)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved