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Subpicosecond GaAs Wafer Probe System

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Abstract

We report a subpicosecond GaAs wafer probe system which incorporates a mechanical flexure and a micromachined GaAs IC for time domain on-wafer measurements. The micromachined GaAs IC incorporates a novel high speed pulse sharpener and a two diode sampling bridge with a micromachined GaAs tip.

© 1993 Optical Society of America

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