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Refined Utah Optrode Array and µLED Array for Deep Cortical Optogenetic Stimulation in Primates

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Abstract

We fabricated a deep optogenetic cortical stimulation device (10×10 glass waveguide array) using wafer dicing, etching and annealing. A µLED array delivers light through individual shanks. A silicon interposer layer with optical vias prevents crosstalk.

© 2018 The Author(s)

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