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Diffraction Analysis of Digital Micromirror Device at Coherent Illumination

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Abstract

Considering periodic microstructure of digital micromirror device, we establish a diffraction model based on blazed grating theory. The model can be used to investigate the diffraction intensity distribution of digital micromirror device at coherent illumination. The model is able to assist us to improve the diffraction efficiency and to restrain the stray light from DMD in an optical system.

© 2013 Optical Society of America

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