Abstract

A very compact (100μm2) integrated sensor device have been designed, simulated and optimized for Au particle detection using FDTD method. The effect of particles size, position, and shape on sensing is demonstrated. Furthermore, optimization of different parameters of ring resonator- radius: 3.5, ridge height: 300 nm, ridge width 250 nm, air gap: .22μm were found. Finally, with optimized parameter a sensor device have been proposed with sensitivity(S) 333.3 nm / RIU, Quality Factor (Q-factor) -17326.5, the free spectral range (FSR)- .00255113μm, Finesse(F)- 2.55113.

© 2011 Optical Society of America

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