The performance of VCSEL array was improved by element device characteristics optimization. The relationship between the reflectivity of N-DBR, threshold current, output power and wall-plug efficiency was analyzed and the N-DBR reflectivity was optimized to achieve the best output characteristics. After N-DBR reflectivity optimization, the CW output power of VCSEL array including 64 elements reaches 2.73W under injected current of 6A and the pulse output power reaches 115W under pulse drive current of 130A, 100ns, 100Hz. The CW output power of VCSEL array including 300 elements reaches 5.26W under injected current of 18A.

© 2011 Optical Society of America

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