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Conferences > Sensors > 2016 > SeW3D > SeW3D.7

A high-temperature endurable MOEMS accelerometer based on 6H-SiC

Li Hui, Liu Liying, Huang Tingfeng, Feng Lishuang, and Zhou Zhen

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Abstract

A novel dual optical path MOEMS accelerometer based on 6H-SiC for high-temperature environment application is designed, which lays the theoretical and experimental foundation to obtain the optimal optical sensing method and SiC-based micro-mechanism of accelerometer.

© 2016 Optical Society of America

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