This paper reports on new custom concentric Si PD array probes for spatially resolved diffuse reflectance (SRDR) measurements. The probes provide photon path information, which enables depth-resolved tissue analysis. Monte Carlo simulations of the probes were conducted to analyze malignancies of varying depths and thicknesses buried in benign tissue. To the best of our knowledge, this is the first reported compact, densely packed semiconductor SRDR probe.
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