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Towards Semiconductor-Superconductor-Crystal Hybrid Integration for Quantum Photonics

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Abstract

We fabricate silicon tapers to increase the mode overlap of superconducting detectors on Ti:LiNbO3 waveguides. Mode images show a reduction in mode size from 6 µm to 2 µm FWHM, agreeing with beam propagation simulations.

© 2020 The Author(s)

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