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Conferences > QIM > 2019 > T5A > T5A.27

Spatially Selective Hydrogen Irradiation/Removal of Dilute Nitrides: A Versatile Nanofabrication Tool for Photonic Applications

Marco Felici, Giorgio Pettinari, Francesco Biccari, Saeed Younis, Mayank Sharma, Silvia Rubini, Annamaria Gerardino, Massimo Gurioli, Anna Vinattieri, Francesca Intonti, and Antonio Polimeni

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Abstract

The possibility to locally incorporate/remove hydrogen atoms in/from dilute-nitride semiconductors is demonstrated. This method can be applied to the fabrication of site-controlled single-photon emitters but also to the optimization/fabrication of photonic devices, via refractive-index engineering.

© 2019 The Author(s)

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