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Conferences > QELS > 2008 > JTuA > JTuA34
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JTuA34

Nanofabrication of Sub-wavelength Grating Using Ultra-fine Nano-machining Process

Jun Nakajima and Fumio Koyama

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Abstract

We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.

© 2008 Optical Society of America

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