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Conferences > QELS > 2008 > JTuA > JTuA22
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JTuA22

High-Index-Contrast AlGaAs Waveguide Scattering Loss Reduction Via Oxidation Smoothing of Sidewall Roughness

Christopher S. Seibert, Di Liang, Douglas C. Hall, and Zane A. Shellenbarger

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Abstract

The propagation loss of single mode high index contrast AlGaAs ridge waveguides is reduced nearly three orders of magnitude (at 1 cm guide length) through application of a nonselective wet oxidation sidewall roughness smoothing technique.

© 2008 Optical Society of America

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