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Conferences > QELS > 2008 > JThA > JThA96
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JThA96

Blue and Yellow Electroluminescence of MOSLED Made on Si-rich SiOx grown by PECVD with detuning Buried Si Nanoclusters Size

Chung-Hsiang Chang and Gong-Ru Lin

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Abstract

Blue and yellow electroluminescence of MOSLEDs made on Si-rich SiOx with buried Si nanocrystals of different sizes controlled with minimum hydrogen passivation are demonstrated by PECVD at different N2O/SiH4 ratio and total fluence.

© 2008 Optical Society of America

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