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Conferences > QELS > 2006 > QMB > QMB3
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper QMB3

Nanoscale imaging with coherent acoustic phonon pulses

J. Klein, T.B. Norris, B.C. Daly, S. Pau, D.M. Tennant, J.A. Taylor, and J.E. Bower

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Abstract

We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.

© 2006 Optical Society of America

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